Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology Reviewing the interaction of light, electron beams, and X-rays with resist materials, Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology explains the theoretical basis of semiconductor fabrication presents the principles of optical image transfer discusses the chemical amplification of resist materials to improve sensitivity describes resolution enhancement and the limits of resolution in resist materials investigates contrast enhancement materials, multilayer resist, and dry development processes introduces a rigorous solution of two-dimensional light wave diffraction for the first time covers practical aspects of typical lithographic processes and more Featuring over 800 references, tables, drawings, photographs, and equations, Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology is ideal for physicists; lithographic, electrical, optical, semiconductor, integrated circuit process, chemical, and process equipment engineers; resist and polymer chemists and photochemists; materials scientists; and upper-level undergraduate and graduate students in these disciplines.

Driving Simulators for the Evaluation of Human-Machine Interfaces in Assisted and Automated Vehicles is a concise reference work on driving simulators, which conveys the technology behind simulator systems used to test driver assistance systems and automated vehicles, including electric vehicles. Coverage includes architecture, computer graphics, evaluation parameters and applied examples. A driving simulator is a device that has the function of presenting similar visual, auditory and force perceptions to those experienced during driving, creating the illusion that the driver is driving an actual car. The advantage of tests using a driving simulator is that it can reproduce dangerous traffic situations and tests safely. Driving simulators are also valuable in research and development into intelligent driving systems, allowing for testing and evaluation in a simulation environment rather than on the road. With its concise selection of relevant material and applied focus, this book will be of use to research and development professionals in industry and academic researchers whose work involves automotive systems and technologies in general, and particularly those working on driving simulators and automated driving.